JPH0356013B2 - - Google Patents

Info

Publication number
JPH0356013B2
JPH0356013B2 JP56127057A JP12705781A JPH0356013B2 JP H0356013 B2 JPH0356013 B2 JP H0356013B2 JP 56127057 A JP56127057 A JP 56127057A JP 12705781 A JP12705781 A JP 12705781A JP H0356013 B2 JPH0356013 B2 JP H0356013B2
Authority
JP
Japan
Prior art keywords
thin film
piezoelectric
thickness
order
electromechanical coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56127057A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5829211A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12705781A priority Critical patent/JPS5829211A/ja
Publication of JPS5829211A publication Critical patent/JPS5829211A/ja
Publication of JPH0356013B2 publication Critical patent/JPH0356013B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP12705781A 1981-08-13 1981-08-13 薄膜圧電振動子 Granted JPS5829211A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12705781A JPS5829211A (ja) 1981-08-13 1981-08-13 薄膜圧電振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12705781A JPS5829211A (ja) 1981-08-13 1981-08-13 薄膜圧電振動子

Publications (2)

Publication Number Publication Date
JPS5829211A JPS5829211A (ja) 1983-02-21
JPH0356013B2 true JPH0356013B2 (en]) 1991-08-27

Family

ID=14950523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12705781A Granted JPS5829211A (ja) 1981-08-13 1981-08-13 薄膜圧電振動子

Country Status (1)

Country Link
JP (1) JPS5829211A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068711A (ja) * 1983-09-26 1985-04-19 Toshiba Corp 圧電薄膜共振子
JPS60189307A (ja) * 1984-03-09 1985-09-26 Toshiba Corp 圧電薄膜共振器およびその製造方法
US6515402B2 (en) * 2001-01-24 2003-02-04 Koninklijke Philips Electronics N.V. Array of ultrasound transducers
JP2004147246A (ja) 2002-10-28 2004-05-20 Matsushita Electric Ind Co Ltd 圧電振動子、それを用いたフィルタ及び圧電振動子の調整方法
JP4978210B2 (ja) * 2007-01-25 2012-07-18 セイコーエプソン株式会社 バルク音響振動子の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140771Y2 (en]) * 1971-10-08 1976-10-05
JPS5424077B2 (en]) * 1972-07-14 1979-08-18
JPS5399976U (en]) * 1977-01-17 1978-08-12

Also Published As

Publication number Publication date
JPS5829211A (ja) 1983-02-21

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